Glossary entry (derived from question below)
English term or phrase:
away from below
French translation:
éloigné de sa position au-dessous du système optique de projection
English term
away from below
contexte "wherein the controller is configured to execute different operations between the one table, which is capable of being away from below the proj ection optical system by the movement of the first and second tables relative to the liquid immersion region for the transfer, and the other table, which is capable of maintaining the liquid immersion region in place of the one table,"
"wherein the apparatus is configured such that for each of the first and second tables, when the substrate mounted on the mount area is moved away from below the projection optical system, the liquid immersion region is maintained between the projection optical system and the auxiliary member."
3 | éloigné de sa position au-dessous du système optique de projection | GILLES MEUNIER |
4 | qui peut ne pas être située sous le système optique de projection | FX Fraipont (X) |
Nov 13, 2013 09:46: writeaway changed "Field (specific)" from "Law: Patents, Trademarks, Copyright" to "Engineering (general)"
Nov 20, 2013 04:51: GILLES MEUNIER Created KOG entry
Discussion