Jul 12, 2013 11:13
11 yrs ago
English term
Tunisia
an under-cut etching
English to French
Tech/Engineering
Engineering (general)
out-of-plane structure
contexte
"The release layer may be a material that can be quickly removed by selective dry or wet undercut etching"
"The release layer may be a material that can be quickly removed by selective dry or wet undercut etching"
Proposed translations
(French)
| 4 +1 | gravure sous-jacente |
FX Fraipont (X)
|
Proposed translations
+1
3 hrs
Selected
gravure sous-jacente
"Cette invention concerne un dispositif et un procédé de détermination de la dimension d'une gravure sous-jacente latérale au moins partielle d'une couche superficielle structurée (23) sur une couche consommable (21).
The invention relates to a device and a method for determining the extent of an at least partial lateral undercut of a structured surface layer (23) on a sacrificial coating (21)"
http://www.google.com/patents/EP1080492A1?cl=en
"If you are making very small features in thin films (comparable to the film thickness), you may also encounter problems with isotropic wet etching, since the undercutting will be at least equal to the film thickness. With dry etching it is possible etch almost straight down without undercutting, which provides much higher resolution. "
http://www.memsnet.org/mems/processes/etch.html
The invention relates to a device and a method for determining the extent of an at least partial lateral undercut of a structured surface layer (23) on a sacrificial coating (21)"
http://www.google.com/patents/EP1080492A1?cl=en
"If you are making very small features in thin films (comparable to the film thickness), you may also encounter problems with isotropic wet etching, since the undercutting will be at least equal to the film thickness. With dry etching it is possible etch almost straight down without undercutting, which provides much higher resolution. "
http://www.memsnet.org/mems/processes/etch.html
4 KudoZ points awarded for this answer.
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